Extreme ultraviolet lithography

Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a kind of photolithography. It is used in the semiconductor industry for making integrated circuits (ICs). This kind of lithography uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin plasma to make (detailed or) intricate patterns on semiconductor substrates.

As of 2023, ASML Holding (a Dutch company) is the only company that produces and sells EUV systems for chip production, targeting 5 nanometer (nm) and 3 nm process nodes.


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